Optical Measurement Forum for Micro-Nano Structure

Room M6 at hall W4, 1st floor, Shanghai New International Expo Centre (SNIEC)


With continuous development of science and technology, micro-nano technology has become a hot field in the modern industry and one of the indicators to measure the country's cutting-edge scientific and technological level. Detection technology and micro-nano processing technology complement are both important guarantees for processing accuracy. In the era of intelligent manufacturing, optical detection has great development potential and application prospects.

Optical Measurement Forum for Micro-Nano Structure will be held at the same time as the fair show. The forum will focus on optical micro-nano detection technology in the field of intelligent manufacturing to provide a platform for professional participants to communicate.



Time:March 21, 2024

Venue: Room M6 at hall W4, 1st floor, Shanghai New International Expo Centre (SNIEC)

Fee: Free



Committee for Optical Test and Measurement of Chinese Optics Society (COS-COTM)

Messe München



Nanjing University of Science and Technology

MIIT Key Laboratory of Advanced Solid Laser

Messe Muenchen Shanghai Co., Ltd.



Prof. Shen Hua, Nanjing University of Science and Technology

Prof. Han Bing, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Prof. Tan Yidong, Tsinghua University



Micro-Nano Structure of Optical Precision Measuring Technology



  • 09:00-10:00



  • 10:00-10:25

Yuan Qun,Nanjing Unversity of Science and Technology,Professor

Topic:Nondestructive measurement of typical parameters for micro-structures utilizing optical microscopy


  • 10:25-10:50

Zhu Jinlong, Huazhong University of Science and Technology, Professor

Topic:“Non-Classical” Quantitative Phase Imaging for 3D Nano-Metrology and Nano-Inspection


  • 10:50-11:15

Hu Chunguang,Tianjin University,Professor



  • 11:15-11:40




  • 11:40-12:05




  • 12:05-14:00

        Lunch Time


  • 14:00-14:25

Gu Honggang,Huazhong University of Science and Technology,Professor



  • 14:25-14:50

Xiong Ying,National University of Defense Technology,Doctor

Topic:Multi-dimensional infrared detection technology based on micro-nano structures


  • 14:50-15:15

Meng Haoran,Changchun Institute of Optics, Fine Mechanicsand Physics, Chinese Academy of Sciences,Researcher

Topic:Wafer structure detection based on partial coherent light digital holography


  • 15:15-15:40

Hou Xi, Institute of Optics and Electronics, Chinese Academy of Sciences,Professor

Topic:Current Status, Development Trends, and Challenges of Ultra-Precision Optical Surface Interferometric Method


  • 15:40-16:05

Su Rong,Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences,Researcher



For most updated information, please refer to the conference schedule posted.


Messe Muenchen Shanghai Co., Ltd.

Ms. Grace Qu

Tel: +86-(0)21-2020 5543

E-mail: grace.qu@mm-sh.com

Messe München GmbH


81823 München

Tel: +49 89 949-20720
Fax: +49 89 949-20729

MMI (Shanghai) Co., Ltd.

11th floor, GC Tower, 1088 Yuanshen Rd


Tel: +86 21 2020 5500
Fax: +86 21 2020 5688